ISSN (print) 1995-2732
ISSN (online) 2412-9003

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Abstract

The effect of the gas mixture pressure on the phase composition, surface morphology, structural characteristics and physicomechanical properties of films on the Ti-Al-N basis, deposited by pulsed magnetron sputtering has been investigated. Polycrystalline film with a unique set of physical and mechanical properties has been obtained under the optimum pressure of the gas mixture.

Keywords

Pulsed magnetron sputtering, gas mix pressure, phase structure, a microstructure, physicomechanical properties.

Kameneva Anna Lvovna – Ph.D. (Eng.), Associate Professor, National Research Perm Polytechnic University, Russia. Phone: (3422) 224-24-05. E-mail: kameneva@pstu.ru.

Soshina Tatyana Olegovna – Head laboratory, Lysvensky branch, National Research Perm Polytechnic University, Russia. Phone: (34249) 6-10-79. E-mail: soshtanya@rambler.ru.

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